TSMC Lithography v1.1.0

TSMC N6

major
1
TSMC N7
minor
1
N6
patch
0
TSMC N6
suffix
—
No suffix

Metadata

PropertyValue
NameTSMC N6
Introduced2020
Feature size6 nm
TransistorFinFET, EUV
SourceCurated (lithography.json)

Uses (dependencies)

No dependencies.

Used by (39)

Intel CPU (11)
Intel Mobile CPU (28)

Changelog

Since the previous minor (lower performance class): TSMC Lithography v1.0.0 (TSMC N7)

Specifications

  • ~Feature size: 7 nm → 6 nm
  • ~Transistor: FinFET → FinFET, EUV

Since the previous major (previous generation): TSMC Lithography v0.0.1 (TSMC 28nm HPM)

Specifications

  • ~Feature size: 28 nm → 6 nm
  • ~Transistor: planar, high-k metal gate → FinFET, EUV