TSMC Lithography v2.0.0

TSMC N5

major
2
TSMC N5
minor
0
N5
patch
0
TSMC N5
suffix
—
No suffix

Metadata

PropertyValue
NameTSMC N5
Introduced2020
Feature size5 nm
TransistorFinFET, EUV
SourceCurated (lithography.json)

Uses (dependencies)

No dependencies.

Used by (30)

Intel CPU (11)
Intel Mobile CPU (19)

Changelog

Since the previous major (previous generation): TSMC Lithography v1.0.0 (TSMC N7)

Specifications

  • ~Feature size: 7 nm → 5 nm
  • ~Transistor: FinFET → FinFET, EUV